Pollution Control in Fab Cleanroom

In the semiconductor manufacturing industry, the cleanliness of the cleanroom (Fab) is crucial for ensuring product quality. However, achieving and maintaining high cleanliness is not an easy task and faces many challenges. The main sources of pollution in clean rooms include personnel activities, equipment operation, raw and auxiliary materials, work methods, and workshop environment, with particulate matter pollution accounting for the highest proportion. This article will explore the key elements of Fab cleanroom management and analyze how to continuously improve cleanliness standards while meeting energy efficiency and sustainability requirements.

1. Clean room pollution sources and control measures

There are various sources of pollution in Fab cleanrooms, among which particulate matter pollution is the most common and challenging. To achieve different levels of cleanliness standards, Fab must be equipped with complex air purification systems, typically using HEPA (High Efficiency Particulate Air) and ULPA (Ultra Low Penetration Air) filters to purify the air. These filters can effectively remove small particles from the air, ensuring the air quality in clean rooms. Meanwhile, controlling temperature and humidity, as well as maintaining a positive pressure environment relative to the outside of the clean room, are important measures to prevent the invasion of pollutants.

Efficient particle control strategy is the core of Fab cleanroom management. There are strict regulations for personnel entry and exit, as well as the use of personal protective equipment (PPE). Personnel must pass through an air shower before entering the clean room to reduce particles adhering to clothing. After entering the clean room, staff must wear dust-free clothing and masks to reduce the emission of human particles. In addition, adopting advanced electrostatic control measures can reduce the attraction of dust by static electricity, and further reduce pollution risks through strict material transfer procedures, such as using dust-free packaging and closed transfer systems.

2. The Importance of Monitoring and Maintenance

Monitoring and maintenance are crucial to ensure that Fab cleanrooms continue to meet established cleanliness standards. This includes regular monitoring of air quality, monitoring of particle concentrations during production processes, and evaluating equipment performance. Advanced particle counters and environmental monitoring systems can track environmental changes in real time, combined with data analysis technology, to predict potential pollution events and quickly take intervention measures before pollution sources expand.

A comprehensive maintenance plan is necessary to maintain the efficient operation of the cleanroom. These plans typically include regular inspections and maintenance of filtration systems, production equipment, and cleanroom infrastructure. These preventive measures help eliminate potential pollution risks and ensure the sustained stability of the production environment.

3. Energy Efficiency and Sustainable Development

With the continuous advancement of semiconductor technology, the requirements for Fab cleanrooms are also constantly increasing, which poses new challenges to energy efficiency and sustainability. The energy consumption during clean room operation is extremely high, and in order to reduce energy consumption, many innovative energy-saving technologies have been widely explored and applied. For example, a variable air volume (VAV) system can adjust air flow according to actual needs, thereby reducing energy waste. In addition, heat recovery technology can effectively utilize the waste heat generated in clean rooms, further reducing energy consumption. The utilization of renewable energy is also constantly expanding, providing cleaner rooms with more environmentally friendly energy options.

At the same time, by optimizing the layout design of the clean room, improving process efficiency, and using green building materials, Fab can reduce its impact on the environment while maintaining efficient production. These measures not only help reduce operating costs, but also drive the semiconductor manufacturing industry towards a more sustainable future.

In the semiconductor manufacturing industry, the management of Fab cleanrooms faces many challenges. Through efficient pollution control strategies, continuous monitoring and maintenance, and innovative energy-saving and sustainable development technologies, Fab can maintain an efficient and green production mode while improving cleanliness standards. This not only helps to improve product quality, but also lays a solid foundation for the sustainable development of the entire industry.