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Electronic semiconductor workshop air filter solution

by:PHARMA     2022-09-19
Electronic semiconductor workshop air filter solution The goal of the semiconductor workshop air purification project is to establish a clean and dust-free working environment to prevent particles, harmful air, bacteria, etc. in the air. Semi-finished products and finished products on the semiconductor production line cause pollution. The traditional ventilation form is that the entire ceiling of the workshop is covered with high-efficiency filters, and the entire floor is a return air grille. Today, AstroFan FFU fan filter unit uses a filter device with its own fan, which solves the complicated installation and cost-effective problems. It is currently one of the quietest and best-priced units on the market, delivering high-quality circulating air for clean rooms. Leading wafer pharma machinery, particle filtration and controlled AMC are a must. Particulate filtration and AMC control are top concerns for the high-yield, low-return-rate semiconductor industry. Failure to properly control particulates or AMC in a clean room or facility will greatly reduce a company's operating profit. The primary concern in cleanrooms is contamination of products, tools, processes, and odor control. Air purification in semiconductor workshops usually consists of: primary efficiency filter/intermediate efficiency filter/high efficiency filter, air-conditioning supply air, return air and exhaust system, power and lighting system, monitoring and alarming of working environment parameters, and fire-fighting, communication system. , people flow and logistics system, process pipeline system and other parts. The traditional form of ventilation is that the entire ceiling of the workshop is covered with high-efficiency filters, and the entire floor is a return air grille. Today, AstroFan FFU fan filter unit uses a filter device with its own fan, which solves the complicated installation and cost-effective problems. It is currently one of the quietest and best-priced units on the market, delivering high-quality circulating air for clean rooms. Uses: The air purification process of semiconductor workshop is widely used in the air purification of production workshops of silicon electronics, radios, televisions, computers, household appliances and other industries. Improve process yield with complete solutions for advanced semiconductor manufacturing. In semiconductor production plants, micro-contamination can cause huge problems. sz-pharma offers a wide range of solutions - particulate pre-filters, HEPA and ULPA filters and AMC control solutions - which can reduce particulate and molecular concentrations in cleanrooms to lSO1 level of particulate matter and sub-ppb level of AMC . AMC filters and controls are more important than pharma clean room filtration Airborne molecular contamination (AMC) presents particular challenges for small-scale semiconductor manufacturing. Undesirable chemical reactions of acids, bases, organics, refractories, and dopants can affect wafer surfaces and process equipment optics, creating defects during chip production and reducing the efficiency of equipment and tools. AMC is increasingly important in critical cleanroom manufacturing processes. As specification requirements increase and equipment size shrinks, process control is under enormous pressure. Wafers can stay in a fab for a month, going through hundreds of processes before delivering the final product. Any small contamination impact in this process chain can have a serious impact on the fab's overall yield. Another challenge is the generalization of larger wafer sizes, which increases the cost per wafer and increases the need for nanoparticle and AMC protection at the tool level. In addition, the rising cost of defect-free masks used in EUV and multi-pattern DUV lithography is putting pressure on facilities as well as pollution control systems in small environments such as inspection equipment and mask stockers. Protect your process equipment and wafers from nanoparticle and airborne molecular contaminants sz-pharma solutions provide field and pharma machinery proven protection in semiconductor manufacturing environments including lithography, etching, diffusion, Metallization, thin films, ion implantation, inspection tools and reticle or wafer storage areas. Process Tools, Air Filters, Air Filters, Scanners, Pre-Filter Systems, Facility Systems' Energy Efficient Exhaust Solutions The Particulate Pre-Filter range ensures the lowest energy use in make-up air handling units while preventing HEPA filters from clogging and Does not release boron. After years of developing the chemical properties of adhesives and media, sz-pharma's HEPA and ULPA filters are designed to release as little organic contaminants as possible (so-called low outgassing). Exhaust systems for wafer dicing and gas scrubbers for general exhaust backup systems protect the environment from process contamination. Boron Free Synthetic Prefilters Low Energy Prefilters Low Outgassing HEPA and ULPA Filters Dust Collectors and Gas Scrubbers for Cleaner Exhaust Gases It is to establish a clean and dust-free working environment to prevent particles, harmful air, bacteria, etc. in the air. Semi-finished products and finished products on the semiconductor production line cause pollution. The traditional form of ventilation is to cover the entire ceiling of the pharmaceutical cleanroom with high-efficiency filters.The entire ground is a return air grille. Today, AstroFan FFU fan filter unit uses a filter device with its own fan, which solves the complicated installation and cost-effective problems. It is currently one of the quietest and best-priced units on the market, delivering high-quality circulating air for clean rooms. The news of this article comes from the Internet, and the copyright belongs to the original author. The content only represents the author's own point of view and does not represent the position of our company. If you have any questions or needs, please contact to delete
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