Design and construction requirements of integrated circuit dust-free workshop
Integrated circuit clean room design and construction requirements The integrated circuit clean room is a clean room to meet the needs of the semiconductor manufacturing process. The clean room has certain requirements for environmental cleanliness, temperature and humidity, vibration, ESD, and AMC control. Compared with other industrial clean rooms, the integrated circuit manufacturing dust-free pharmaceutical cleanroom has the characteristics of large area, high cleanliness level, and high temperature and humidity control accuracy. According to the air circulation characteristics of the clean room workshop, the clean room can be divided into three types: circulating air conditioner with high-efficiency air supply system, circulating fan with wet sealing system and FFU circulation system. The first form is widely used in the design of clean room workshops with small-scale and low-level requirements. For large-area and high-level clean rooms, there are disadvantages such as high operating costs and excessive space occupation. The first form of design can meet the large-scale and high-level requirements of integrated circuit manufacturing dust-free workshops, but the operating cost is high, and it is difficult to adjust the air speed and air volume in the clean room, and it is difficult to upgrade the system, so the operation flexibility is very low. The third type of FFU circulation system not only saves operating space, has high cleanliness and safety, and has low operating costs, but also has high operational flexibility, which can be upgraded and adjusted at any time without affecting production. To meet the needs of semiconductor manufacturing, the FFU circulation system has gradually become the most important purification design scheme in the semiconductor manufacturing industry. The characteristics of the FFU circulation system are: the entire clean room is composed of static pressure layer, process layer, process auxiliary layer and return air channel. Into the process layer and the process auxiliary layer, the static pressure layer is negative pressure relative to the process layer. In addition, there is a production auxiliary area for the integrated circuit manufacturing plant equipment area, including power supply, gas and chemical supply, ultrapure water supply, etc. Integrated circuit manufacturing has stricter requirements on the control of the clean room environment. Different processes have different requirements for cleanliness. For example, lithography requires a level 1 microenvironment, while chemical mechanical polishing only requires a level 1000 environment. In addition, the integrated circuit manufacturing clean workshop has relevant regulations and requirements on noise, micro-vibration, illuminance, etc., especially the control of vibration, which must be required in the architectural design of the clean room. A good clean pharmaceutical cleanroom design can not only save energy, reduce operating costs, and reduce labor input, but also provide a complete guarantee for production. Among the three cleaning systems, the FFU circulation system has the highest operating cost and safe cleanliness. Therefore, the integrated circuit clean pharmaceutical cleanroom mostly adopts the FFU circulation system. The higher the cleanliness requirements and the higher the temperature and humidity control accuracy, the higher the clean room investment and operating costs. Therefore, in the case of relatively low environmental cleanliness or temperature and humidity requirements, some key process pharma machinery should be arranged at higher Cleanliness or temperature and humidity control areas are the design trends of clean workshops for integrated circuit manufacturing. Integrated circuit manufacturing is an industry with high energy consumption, and the energy consumption of clean air conditioning system accounts for more than 30% of it. Therefore, energy-saving and safe clean room design and various heat energy recovery designs will be the future development direction. With the continuous upgrading of integrated circuit manufacturing technology, mainstream manufacturers have entered the nano era, and the design, construction and energy saving efficiency of integrated circuit manufacturing clean workshops also need to be continuously improved to provide guarantee for the production of high-end process products.
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