Comment distinguer les fonctions de l’eau glacée, de l’eau de refroidissement de procédé et des tours de refroidissement ?

The use of chilled water, process cooling water, and cooling towers: 1) Chilled water: used for clean room environmental control, PCW process cooling water, pure water preparation, and substation heat dissipation.

Process Cooling Water (PCW): Process equipment (not only chip manufacturing equipment, but also some cutting, grinding, polishing equipment and ancillary equipment, basically all use PCW process cooling water for cooling).

Cooling tower: refers to general cooling water. The cooling water in the cooling tower is mainly used for cooling power equipment, such as refrigeration stations, air compressors, and other large equipment in CUB for heat dissipation.

The function of the chiller unit is to exchange heat with chilled water and process cooling water through the circulation of refrigerant (commonly R134A). Chilled water can be medium or low temperature, while PCW is equivalent to a branch of CUB refrigeration system (actually "relatively high temperature chilled water"), without its own independent system. The process cooling water undergoes heat exchange with the chiller unit to reduce heat. Cooling towers are relatively independent of chilled water and process cooling water, and can also be referred to as "general cooling water", which is used for heat dissipation of large equipment such as refrigeration stations and air compressors as mentioned above. So why not use PCW directly to dissipate heat from refrigeration stations, air compressors, etc? Mainly because PCW uses electricity for energy supply, which is costly, and the cooling water quality requirements for process equipment are relatively high (usually primary pure water). When cooling stations, air compressors, etc., the water quality requirements are relatively low. By using cooling towers for heat dissipation and exchanging heat with the atmosphere, the cost-effectiveness is particularly prominent. This is also the reason for placing the cooling tower directly on top of the CUB roof.

Water temperature range: (1) Chilled water: The temperature is usually low, with the inlet water temperature usually around 12 ℃~18 ℃ and the outlet water temperature generally around 6 ℃~12 ℃ (the chilled water supply temperature in semiconductor factories is generally divided into low temperature (around 6 ℃) and medium temperature (around 12 ℃) to meet different equipment requirements); (2) Process cooling water: The temperature is relatively high, generally the inlet temperature is around 35-40 ℃, and the outlet temperature is around 30-35 ℃. (3) Cooling tower cooling water: Generally, the inlet temperature is between 30 ℃ -40 ℃, and the outlet temperature is between 25 ℃ -32 ℃.

Suzhou Pharma Machinery Co.,Ltd.

2025/03/31

Gino