Introduction of Eight Exhaust Systems for Cleanrooms/Purification Plants - Cleanroom Related

In the clean room for microelectronics and the clean room for pharmaceutical production, it is often used or produced in the product production process, various acidic and alkaline substances, organic solvents and general gases, special gases; in allergenic drugs, some steroids In the production process of biopharmaceuticals, highly active and toxic drugs, corresponding harmful substances will be discharged or leaked into the clean room. For this reason, the production process equipment or procedures that may discharge various harmful substances, gases or dusts from the clean room for the production of the above products Set up a local exhaust device or a whole room exhaust device. According to the type of exhaust gas discharged from the production process, the exhaust device (system) can be roughly divided into the following types. (1) General exhaust system This refers to the general waste gas discharged from production auxiliary rooms, living rooms, such as duty rooms, toilets, etc. In most cases, it can be directly discharged into the atmosphere without special treatment. (2) Organic gas exhaust system When various organic substances and solvents are used as raw and auxiliary materials or cleaning agents in the production of products, the gas of organic substances and solvents will be emitted in the relevant places or equipment. Or equipment should be equipped with exhaust devices. Under normal circumstances, the organic gas concentration in the organic exhaust system is very low. If it can reach the atmospheric emission standard stipulated by the national standard, it can be directly discharged into the atmosphere without setting up an exhaust gas treatment device; when the organic gas concentration in the exhaust system is When it exceeds the regulations, an organic gas treatment device should be installed, and it can be discharged into the atmosphere after the treatment reaches the standard. The purification treatment of organic exhaust gas includes activated carbon adsorption method, liquid absorption method and catalytic combustion method. The equipment is simple, the energy consumption is low, but the absorption efficiency is not high; the catalytic combustion method is mainly used for the treatment of organic exhaust gas such as benzene, alcohols, lipids, gasoline, etc. with higher concentrations. The organic gas treatment device should select corresponding treatment equipment according to the type and concentration of organic substances contained in the exhaust system. (3) Acid gas exhaust system has acid gas discharge during wet chemical corrosion, acid cleaning, and pharma machinery in product production. In such acid gas exhaust system, a warm scrubber absorption tower is usually installed to deal with After discharge into the atmosphere, Figure 5-56 shows several forms of absorption scrubbers. In actual design, appropriate absorption liquid and absorption tower form should be selected according to the type and concentration of acid gas [20]. (4) The alkaline gas exhaust system contains alkaline substances in the exhaust system gas or mixes alkaline chemical reagents in the exhaust gas. Similar to the acid gas exhaust system, it is usually treated by a wet scrubbing absorption tower and then discharged into the atmosphere. . In recent years, due to the stricter and stricter atmospheric emission standards, it is necessary to purify the exhaust gas containing low concentrations of alkaline substances (or acidic substances) to meet the emission standards. The gas (or acid exhaust gas) can only be discharged into the atmosphere after the treatment reaches the standard. This kind of adsorbent is generally disposable and should be treated centrally after use. Usually, it is treated as a solid waste by the municipal waste disposal site. (5) The hot gas exhaust system discharges hot gas from various furnaces and high-temperature sterilization pharma machinery in the production process. Due to the high exhaust temperature, heat recovery and other methods can sometimes be used for treatment. If the exhaust volume is small Or when it is inconvenient to handle, it is directly discharged into the atmosphere after taking necessary insulation measures. (6) In view of different product varieties and different production processes, the dust-containing exhaust system has different properties and concentrations of dust in the exhaust gas. Various dust removal devices should be selected according to the properties and concentrations of dust in the exhaust gas. Bag filter, filter device with filter element [21], Figure 5-57 is a filter filter with filter element. Such devices can take the form of flapping back blowing or replacing filter elements, so that the dust removal device can be used for a long time. For some exhaust systems with high dust concentration, according to the specific conditions of the project, it is sometimes necessary to set up a secondary dust removal device to remove most of the dust and then send it to the aforementioned cloth bag or filter dust removal device, so as to meet the requirements of atmospheric emission standards. So as to operate stably and economically. (7) Special gas exhaust systems often need to use some special gases in the production of semiconductor integrated circuits, many of which are flammable, explosive or toxic or even highly toxic or corrosive gases. The exhaust system should be divided according to the type and nature of the special gas, and chemical reactions must be prevented in the exhaust system; secondly, a special waste treatment device should be selected. Catalytic combustion method, etc.; in addition, the selection of materials for the equipment and pipes of the exhaust system must be based on the characteristics of the special gas in the exhaust gas.It must not react with emitted special gases. Figure 5-58 is a special gas treatment equipment. First, in the catalytic reaction section, the harmful components are catalyzed (combusted), and then sent to the adsorption section to adsorb and remove various catalytic reaction products, and then discharged into the atmosphere after reaching the emission standard. The adsorbent is periodically regenerated and activated to restore the adsorption capacity according to the design requirements. (8) Harmful and toxic exhaust systems in drug production are used in the production or distribution of strong allergenic drugs such as penicillin, certain steroid drugs, and highly active and toxic drugs, and the exhaust of pathogens operating areas above Class II risk. Air outlets, high-efficiency filters should be installed to minimize the risk of contamination caused by these drugs. And the air outlet of this type of air exhaust system discharged into the atmosphere should be separated by a certain distance from the fresh air inlet of other purification air conditioning systems for pharmaceutical production.
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