Cleanroom static pressure differential inspection requirements and standards
The static pressure difference detection of the clean room is to prevent the interaction between indoor and outdoor airflow. The static pressure difference of the clean room can be positive pressure or negative pressure. The static pressure difference detection requirement is that all doors in the clean area of u200bu200bthe clean room are closed, and it should be performed in order from the highest cleanliness to the bottom until the outdoor room is detected. The static pressure measuring nozzle can be located in a place where there is no air flow in the clean room, and the surface of the measuring nozzle should be kept parallel to the airflow. The data recorded and measured is preferably accurate to 1.0Pa. According to the static pressure difference detection of the clean room, the measurement steps are: first close the doors of the clean room, and then use a differential pressure gauge to measure the difference between the clean room, the clean room and the corridor The pressure difference between the corridor and the outdoor, record all the measurement data. After the static pressure difference of the clean clean room modular is measured, the positive or negative pressure of the clean room is maintained according to the design or process requirements, and the qualified standard is compared. 1. The static pressure difference between the clean room area and the non-clean room area with different levels should not be less than 5Pa; 2. The static pressure difference between the clean room and the outdoor should not be less than 10Pa; 3. The open air cleanliness level should be higher than 100 Pa. When the one-way flow clean room door is one level, the dust concentration of the indoor working area within 0.6 meters of the door should not be greater than the dust concentration limit of the corresponding level. 4. For those that do not meet the above standards, the fresh air volume and exhaust air volume of the clean room should be re-adjusted until they are qualified.
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