Application of Fan Filter Unit in Clean Room
The use of FFU fan filter unit can effectively save space and solve the problem of narrow maintenance space on the top of the ceiling in the clean room. As the high-level clean workshop needs 100 level or even 10 level laminar flow hoods to meet the process requirements, the upper part of the suspended ceiling of the clean room will be equipped with huge air supply static pressure boxes, and the static pressure boxes will be equipped with ventilators. These static pressure boxes, together with the air supply pipes and return air pipes, will occupy a large space, making the maintenance space narrow, and sometimes even affecting the use of fire fighting passages.
When we use FFU, the ceiling of the clean room will be divided into several modules, and each module is a FFU. In this way, we can adjust each module to meet the requirements of the pressure balance of the air supply plenum box above the ceiling, thus greatly reducing the requirements for the height of the plenum box. At the same time, huge air supply ducts and return ducts can be saved, so installation space can be saved. Especially when the reconstruction project is limited by the floor height, FFU can effectively solve this problem. In addition, FFU has various sizes, which can be customized according to the actual size of the clean room. For this reason, it occupies less floor height in the plenum box, or even basically does not occupy the space in the clean room, so it can better save space.
FFU fan filter unit plays an important role in the clean room. FFU flexibility can be adjusted at any time by using the structural characteristics of FFU independence to make up for the lack of mobility in the clean room, thus solving the problem that the production process should not be adjusted.
The maintenance structure of the clean room workshop is generally made of metal plates. After completion, the layout cannot be changed at will. However, due to the continuous updating of the production process, the original workshop cleanliness layout cannot meet the needs of the new process, resulting in frequent changes of the clean room due to product replacement, which wastes a lot of financial and material resources.
If the number of FFU is increased or decreased, the cleanliness layout of the room can be partially adjusted to meet the process changes. Moreover, FFU have their own power, air outlets and lamps, which can save a lot of investment. It is almost impossible to achieve the same effect for the purification system with centralized air supply.
Because FFU is self powered, it is not limited by the region. In a large clean workshop, it can be controlled by zones as required. Moreover, with the change of semiconductor production process, the plant layout must be adjusted accordingly. The flexibility of FFU makes such adjustment easy and will not bring about secondary investment.
Suzhou Pharma Machinery Co.,Ltd.
2022/12/09
Spencer
