The task of the HVAC system is to ensure that the air parameter of the clean room reach the required state, usually consisting of ventilation systems, air handling equipment, cold/heat sources, water systems air conditioning and control systems.

1. Ventilation system: including air supply system, return air system and exhaust system.

2. Air handling equipment: physical treatment of air (purification, heating, cooling, humidification, dehumidification, etc.) to achieve the specified state

3. Cold and heat sources: The cold source is usually a refrigeration equipment such as various types of chillers, which provide 7-12℃ low temperature water for air treatment equipment; heat sources usually include electric heaters, boilers, hot water and heat pump units, etc. Providing heat to air handling equipment..

4. Water system air conditioning : including circulating water pump and its piping system.

5.Automatic control system: including air purification, temperature and humidity control, differential pressure control and automatic control and adjustment devices for safety and energy saving.